Modules / Lectures
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Sl.No Chapter Name MP4 Download Transcript Download
1IntroductionDownloadPDF unavailable
2SubstrateDownloadPDF unavailable
3Substrate ContdDownloadPDF unavailable
4Introduction to cleanroomDownloadPDF unavailable
5Contamination and surface cleaningDownloadPDF unavailable
6Advanced cleaning techniquesDownloadPDF unavailable
7DefectsDownloadPDF unavailable
8DiffusionDownloadPDF unavailable
9Diffusion -- Advanced ConceptsDownloadPDF unavailable
10Ion ImplantationDownloadPDF unavailable
11Ion Implantation ContdDownloadPDF unavailable
12Native FilmsDownloadPDF unavailable
13Native Films: Advanced ConceptsDownloadPDF unavailable
14Native Films: Defects at Si/SiO2 interfaceDownloadPDF unavailable
15Methods and Some DefinitionsDownloadPDF unavailable
16Chemical Vapor Depostion: BasicsDownloadPDF unavailable
17Chemical Vapor Depostion: Precursor TransportDownloadPDF unavailable
18Chemical Vapor Depostion: Types of CVD EquipmentDownloadPDF unavailable
19Chemical Vapor Depostion: Nucleation and GrowthDownloadPDF unavailable
20Chemical Vapor Depostion: Other DetailsDownloadPDF unavailable
21Atomic Layer DepostionDownloadPDF unavailable
22Atomic Layer Depostion Contd..DownloadPDF unavailable
23Physical Vapor Deposition: BasicsDownloadPDF unavailable
24Physical Vapor Deposition: EvaporationDownloadPDF unavailable
25Physical Vapor Deposition: SputteringDownloadPDF unavailable
26Mettalization: Contact resistanceDownloadPDF unavailable
27Mettalization: Electromigration and EpilogueDownloadPDF unavailable
28Pattern Transfer BascisDownloadPDF unavailable
29Optical lithography basics: resist process-1DownloadPDF unavailable
30Optical lithography basics: resist process-2DownloadPDF unavailable
31Optical Lithography: Contact and Proximity printing DownloadPDF unavailable
32Optical Lithography: Stepper and ScannerDownloadPDF unavailable
33Projection Lithography: Image formation basicsDownloadPDF unavailable
34Projection Lithography: Image formation in photoresistDownloadPDF unavailable
35Optical lithography: Surface ReflectionDownloadPDF unavailable
36Optical Lithography: Mask TechnologyDownloadPDF unavailable
37Lithography process technology glossaryDownloadPDF unavailable
38Optical Lithography: Resolution enhancementDownloadPDF unavailable
39Electron beam lithography: BasicsDownloadPDF unavailable
40Electron beam lithography: Resist process DownloadPDF unavailable
41Emerging lithography techniquesDownloadPDF unavailable