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Sl.No Chapter Name MP4 Download Transcript Download
1IntroductionDownloadDownload
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2SubstrateDownloadDownload
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3Substrate ContdDownloadDownload
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4Introduction to cleanroomDownloadDownload
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5Contamination and surface cleaningDownloadDownload
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6Advanced cleaning techniquesDownloadDownload
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7DefectsDownloadDownload
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8DiffusionDownloadDownload
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9Diffusion -- Advanced ConceptsDownloadDownload
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10Ion ImplantationDownloadDownload
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11Ion Implantation ContdDownloadPDF unavailable
12Native FilmsDownloadPDF unavailable
13Native Films: Advanced ConceptsDownloadPDF unavailable
14Native Films: Defects at Si/SiO2 interfaceDownloadPDF unavailable
15Methods and Some DefinitionsDownloadPDF unavailable
16Chemical Vapor Depostion: BasicsDownloadPDF unavailable
17Chemical Vapor Depostion: Precursor TransportDownloadPDF unavailable
18Chemical Vapor Depostion: Types of CVD EquipmentDownloadPDF unavailable
19Chemical Vapor Depostion: Nucleation and GrowthDownloadPDF unavailable
20Chemical Vapor Depostion: Other DetailsDownloadPDF unavailable
21Atomic Layer DepostionDownloadPDF unavailable
22Atomic Layer Depostion Contd..DownloadPDF unavailable
23Physical Vapor Deposition: BasicsDownloadPDF unavailable
24Physical Vapor Deposition: EvaporationDownloadPDF unavailable
25Physical Vapor Deposition: SputteringDownloadPDF unavailable
26Mettalization: Contact resistanceDownloadPDF unavailable
27Mettalization: Electromigration and EpilogueDownloadPDF unavailable
28Pattern Transfer BascisDownloadPDF unavailable
29Optical lithography basics: resist process-1DownloadPDF unavailable
30Optical lithography basics: resist process-2DownloadPDF unavailable
31Optical Lithography: Contact and Proximity printing DownloadPDF unavailable
32Optical Lithography: Stepper and ScannerDownloadPDF unavailable
33Projection Lithography: Image formation basicsDownloadPDF unavailable
34Projection Lithography: Image formation in photoresistDownloadPDF unavailable
35Optical lithography: Surface ReflectionDownloadPDF unavailable
36Optical Lithography: Mask TechnologyDownloadPDF unavailable
37Lithography process technology glossaryDownloadPDF unavailable
38Optical Lithography: Resolution enhancementDownloadPDF unavailable
39Electron beam lithography: BasicsDownloadPDF unavailable
40Electron beam lithography: Resist process DownloadPDF unavailable
41Emerging lithography techniquesDownloadPDF unavailable
42Etching Figures of MeritDownloadPDF unavailable
43Wet etching BasicsDownloadPDF unavailable
44Wet Ething RecipesDownloadPDF unavailable
45Wet Ething Recipes.DownloadPDF unavailable
46Dry etch: Plasma BasicsDownloadPDF unavailable
47Dry etch: Plasma etching basicsDownloadPDF unavailable
48Dry etch: Plasma tool configurationDownloadPDF unavailable
49Dry etch: Etch mechanismDownloadPDF unavailable
50Dry etch: Etch chemistryDownloadPDF unavailable
51Chemical Mechanical Polishing (CMP): BasicsDownloadPDF unavailable
52Chemical Mechanical Polishing (CMP): Tool and processDownloadPDF unavailable
53Design for Manufacturability-1DownloadPDF unavailable
54Design for Manufacturability-2DownloadPDF unavailable
55Design for Manufacturability: Case studyDownloadPDF unavailable
56Process integrationDownloadPDF unavailable
57PV integrationDownloadPDF unavailable
58CMOS integrationDownloadPDF unavailable
59Lab demo: Silicon Nitride cantilever fabrication-1DownloadPDF unavailable
60Lab demo: Silicon Nitride cantilever fabrication-2DownloadPDF unavailable
61CMOS process for photonics applicationDownloadPDF unavailable