Modules / Lectures
Module NameDownload


Sl.No Chapter Name MP4 Download
1IntroductionDownload
2SubstrateDownload
3Substrate ContdDownload
4Introduction to cleanroomDownload
5Contamination and surface cleaningDownload
6Advanced cleaning techniquesDownload
7DefectsDownload
8DiffusionDownload
9Diffusion -- Advanced ConceptsDownload
10Ion ImplantationDownload
11Ion Implantation ContdDownload
12Native FilmsDownload
13Native Films: Advanced ConceptsDownload
14Native Films: Defects at Si/SiO2 interfaceDownload
15Methods and Some DefinitionsDownload
16Chemical Vapor Depostion: BasicsDownload
17Chemical Vapor Depostion: Precursor TransportDownload
18Chemical Vapor Depostion: Types of CVD EquipmentDownload
19Chemical Vapor Depostion: Nucleation and GrowthDownload
20Chemical Vapor Depostion: Other DetailsDownload
21Atomic Layer DepostionDownload
22Atomic Layer Depostion Contd..Download
23Physical Vapor Deposition: BasicsDownload
24Physical Vapor Deposition: EvaporationDownload
25Physical Vapor Deposition: SputteringDownload
26Mettalization: Contact resistanceDownload
27Mettalization: Electromigration and EpilogueDownload
28Pattern Transfer BascisDownload
29Optical lithography basics: resist process-1Download
30Optical lithography basics: resist process-2Download
31Optical Lithography: Contact and Proximity printing Download
32Optical Lithography: Stepper and ScannerDownload
33Projection Lithography: Image formation basicsDownload
34Projection Lithography: Image formation in photoresistDownload
35Optical lithography: Surface ReflectionDownload
36Optical Lithography: Mask TechnologyDownload
37Lithography process technology glossaryDownload
38Optical Lithography: Resolution enhancementDownload
39Electron beam lithography: BasicsDownload
40Electron beam lithography: Resist process Download
41Emerging lithography techniquesDownload
42Etching Figures of MeritDownload
43Wet etching BasicsDownload
44Wet Ething RecipesDownload
45Wet Ething Recipes.Download
46Dry etch: Plasma BasicsDownload
47Dry etch: Plasma etching basicsDownload
48Dry etch: Plasma tool configurationDownload
49Dry etch: Etch mechanismDownload
50Dry etch: Etch chemistryDownload
51Chemical Mechanical Polishing (CMP): BasicsDownload
52Chemical Mechanical Polishing (CMP): Tool and processDownload
53Design for Manufacturability-1Download
54Design for Manufacturability-2Download
55Design for Manufacturability: Case studyDownload
56Process integrationDownload
57PV integrationDownload
58CMOS integrationDownload
59Lab demo: Silicon Nitride cantilever fabrication-1Download
60Lab demo: Silicon Nitride cantilever fabrication-2Download
61CMOS process for photonics applicationDownload

Sl.No Chapter Name English
1IntroductionDownload
Verified
2SubstrateDownload
Verified
3Substrate ContdDownload
Verified
4Introduction to cleanroomDownload
Verified
5Contamination and surface cleaningDownload
Verified
6Advanced cleaning techniquesDownload
Verified
7DefectsDownload
Verified
8DiffusionDownload
Verified
9Diffusion -- Advanced ConceptsDownload
Verified
10Ion ImplantationDownload
Verified
11Ion Implantation ContdDownload
Verified
12Native FilmsDownload
Verified
13Native Films: Advanced ConceptsDownload
Verified
14Native Films: Defects at Si/SiO2 interfaceDownload
Verified
15Methods and Some DefinitionsDownload
Verified
16Chemical Vapor Depostion: BasicsDownload
Verified
17Chemical Vapor Depostion: Precursor TransportDownload
Verified
18Chemical Vapor Depostion: Types of CVD EquipmentDownload
Verified
19Chemical Vapor Depostion: Nucleation and GrowthPDF unavailable
20Chemical Vapor Depostion: Other DetailsPDF unavailable
21Atomic Layer DepostionPDF unavailable
22Atomic Layer Depostion Contd..PDF unavailable
23Physical Vapor Deposition: BasicsPDF unavailable
24Physical Vapor Deposition: EvaporationPDF unavailable
25Physical Vapor Deposition: SputteringPDF unavailable
26Mettalization: Contact resistancePDF unavailable
27Mettalization: Electromigration and EpiloguePDF unavailable
28Pattern Transfer BascisPDF unavailable
29Optical lithography basics: resist process-1PDF unavailable
30Optical lithography basics: resist process-2PDF unavailable
31Optical Lithography: Contact and Proximity printing PDF unavailable
32Optical Lithography: Stepper and ScannerPDF unavailable
33Projection Lithography: Image formation basicsPDF unavailable
34Projection Lithography: Image formation in photoresistPDF unavailable
35Optical lithography: Surface ReflectionPDF unavailable
36Optical Lithography: Mask TechnologyPDF unavailable
37Lithography process technology glossaryDownload
Verified
38Optical Lithography: Resolution enhancementDownload
Verified
39Electron beam lithography: BasicsDownload
Verified
40Electron beam lithography: Resist process Download
Verified
41Emerging lithography techniquesDownload
Verified
42Etching Figures of MeritPDF unavailable
43Wet etching BasicsPDF unavailable
44Wet Ething RecipesPDF unavailable
45Wet Ething Recipes.PDF unavailable
46Dry etch: Plasma BasicsPDF unavailable
47Dry etch: Plasma etching basicsPDF unavailable
48Dry etch: Plasma tool configurationPDF unavailable
49Dry etch: Etch mechanismPDF unavailable
50Dry etch: Etch chemistryPDF unavailable
51Chemical Mechanical Polishing (CMP): BasicsPDF unavailable
52Chemical Mechanical Polishing (CMP): Tool and processPDF unavailable
53Design for Manufacturability-1PDF unavailable
54Design for Manufacturability-2PDF unavailable
55Design for Manufacturability: Case studyPDF unavailable
56Process integrationPDF unavailable
57PV integrationPDF unavailable
58CMOS integrationPDF unavailable
59Lab demo: Silicon Nitride cantilever fabrication-1PDF unavailable
60Lab demo: Silicon Nitride cantilever fabrication-2PDF unavailable
61CMOS process for photonics applicationPDF unavailable


Sl.No Language Book link
1EnglishNot Available
2BengaliNot Available
3GujaratiNot Available
4HindiNot Available
5KannadaNot Available
6MalayalamNot Available
7MarathiNot Available
8TamilNot Available
9TeluguNot Available