Sl.No Chapter Name English
1Introduction on VLSI DesignDownload
Verified
2Bipolar Junction Transistor FabricationDownload
Verified
3MOSFET Fabrication for ICDownload
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4Crystal Structure of SiDownload
Verified
5Crystal Structure contdDownload
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6Defects in Crystal + Crystal growthDownload
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7Crystal growth Contd + Epitaxy IDownload
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8Epitaxy II - Vapour phase EpitaxyDownload
Verified
9Epitaxy III - Doping during EpitaxyDownload
Verified
10Molecular beam EpitaxyDownload
Verified
11Oxidation I - Kinetics of OxidationDownload
Verified
12Oxidation II Oxidation rate constantsDownload
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13Oxidation III - Dopant RedistributionDownload
Verified
14Oxidation IV - Oxide ChargesDownload
Verified
15Diffusion I - Theory of DiffusionDownload
Verified
16Diffusion II - Infinite SourceDownload
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17Diffusion III - Actual Doping ProfilesDownload
Verified
18Diffusion IV Diffusion SystemsDownload
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19Ion - Implantation ProcessDownload
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20Ion - Implantation ProcessDownload
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21Annealing of DamagesDownload
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22Masking during ImplantationDownload
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23Lithography - IDownload
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24Lithography - IIDownload
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25Wet Chemical EtchingDownload
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26Dry EtchingDownload
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27Plasma Etching SystemsDownload
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28Etching of Si,Sio2,SiN and other materialsDownload
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29Plasma Deposition ProcessDownload
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30Metallization - IDownload
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31Problems in Aluminium Metal contactsDownload
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32IC BJT - From junction isolation to LOCOSDownload
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33Problems in LOCOS + Trench isolationDownload
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34More about BJT Fabrication and RealizationDownload
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35Circuits + Transistors in ECL CircuitsDownload
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36MOSFET I - Metal gate vs. Self-aligned Poly-gateDownload
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37MOSFET II Tailoring of Device ParametersDownload
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38CMOS TechnologyDownload
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39Latch - up in CMOSDownload
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40BICMOS TechnologyDownload
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