Module NameDownload

Sl.No Chapter Name English
1Introduction to MEMS & MicrosystemsPDF unavailable
2Introduction to MicrosensorsPDF unavailable
3Evaluation of MEMS, Microsensors, Market SurveyPDF unavailable
4Application of MEMSPDF unavailable
5MEMS MaterialsPDF unavailable
6MEMS Materials PropertiesPDF unavailable
7MEMS Materials Properties (Contd.)PDF unavailable
8Microelectronic Technology for MEMS - IIPDF unavailable
9Microelectronic Technology for MEMS - IIIPDF unavailable
10Micromachining Technology for MEMSPDF unavailable
11Micromachining ProcessPDF unavailable
12Etch Stop Techniques and MicrostructurePDF unavailable
13Surface and Quartz MicromachiningPDF unavailable
14Fabrication of Micromachined MicrostructurePDF unavailable
15MicrostereolithographyPDF unavailable
16MEMS Microsensors ThermalPDF unavailable
17Micromachined Microsensors MechanicalPDF unavailable
18MEMS Pressure and Flow SensorPDF unavailable
19Micromachined Flow SensorsPDF unavailable
20MEMS Inertial SensorsPDF unavailable
21Micromachined Microaccelerometers for MEMSPDF unavailable
22MEMS Accelerometers for AvionicsPDF unavailable
23Temperature Drift and Damping AnalysisPDF unavailable
24Piezoresistive Accelerometer TechnologyPDF unavailable
25MEMS Capacitive AccelerometerPDF unavailable
26MEMS Capacitive Accelerometer ProcessPDF unavailable
27MEMS Gyro SensorPDF unavailable
28MEMS for Space ApplicationPDF unavailable
29Polymer MEMS & Carbon Nano Tubes CNTPDF unavailable
30Wafer Bonding & Packaging of MEMSPDF unavailable
31Interface Electronics for MEMSPDF unavailable
32MEMS for Biomedical Applications (Bio-MEMS)PDF unavailable

Sl.No Language Book link
1EnglishNot Available
2BengaliNot Available
3GujaratiNot Available
4HindiNot Available
5KannadaNot Available
6MalayalamNot Available
7MarathiNot Available
8TamilNot Available
9TeluguNot Available