Modules / Lectures
NameDownloadDownload Size
Lecture NoteDownload as zip file133M
Module NameDownload
Module NameDownloadDescriptionDownload Size
Introduction to Micro and Smart SystemsModule1 QuestionsQuestions for Module172
Microfabrication processesModule2 QuestionsQuestions for Module292
Mechanics of Slender SolidsModule3 QuestionsQuestions for Module3116
Finite Element MethodModule4 QuestionsQuestions for Module4228
Electronics and PackagingModule5 QuestionsQuestions for Module5144


Sl.No Chapter Name MP4 Download
1Glimpses of Microsystems: Scaling Effects Download
2Smart Materials and SystemsDownload
3MicrosensorsDownload
4MicroactuatorsDownload
5Microsystems: some ExamplesDownload
6Smart systems Application and Structural Health MonitoringDownload
7Microfabrication TechnologiesDownload
8Thin-film Materials and their DepositionDownload
9Approaches for Pattern TransferDownload
10Surface Micromachining of MicrostructuresDownload
11Bulk Micromachining of MicrosystemsDownload
12Extended Approaches for Working MicrosystemsDownload
13Non-conventional Approaches for MicrosystemsDownload
14Packaging of MicrosystemsDownload
15Deformation Strains and StressesDownload
16Microdevice Suspensions: Lumped ModelingDownload
17Residual Stress and Stress GradientsDownload
18Torsion and TwistDownload
19Vibrations of Microsystems Devices: Part -1Download
20Vibrations of Microsystems Devices: Part -2 Micromachined Gyroscopes: Part -1Download
21Micromachined Gyroscopes: Part -2 Modelling of Coupled Electrostatic Microsystems: Part -1Download
22Modelling of Coupled Electrostatic Microsystems: Part -2Download
23Coupled Electrothermal-elastic ModellingDownload
24Modelling of Microsystems: Scaling EffectsDownload
25Finite Element Method and MicrosystemsDownload
26Theoretical Basis for the Finite Element MethodDownload
27Energy Theorems and Weak Form of the Governing EquationDownload
28Finite Element Equation Development and Shape FunctionsDownload
29Isoparametric FE Formulation and some ExamplesDownload
30Finite Element for Structures with Piezoelectric MaterialDownload
31Semiconductor Device PhysicsDownload
32BJT and MOSFET Characteristics and Op-AmpsDownload
33Op-Amp Circuits and Signal conditioning for Microsystems DevicesDownload
34Control and MicrosystemsDownload
35Vibration Control of a BeamDownload
36Signal Conditioning Circuits and Integration of Microsystems and MicroelectronicsDownload
37Pressure Sensor Design Concepts, Processing, and Packaging: Part -1Download
38Pressure Sensor Design Concepts, Processing, and Packaging: Part -2Download
39Pressure Sensor Design Concepts, Processing, and Packaging: Part -3 Capacitive Micro-accelerometer: Part -1Download
40Capacitive Micro-accelerometer: Part -2Download

Sl.No Chapter Name English
1Glimpses of Microsystems: Scaling Effects PDF unavailable
2Smart Materials and SystemsPDF unavailable
3MicrosensorsPDF unavailable
4MicroactuatorsPDF unavailable
5Microsystems: some ExamplesPDF unavailable
6Smart systems Application and Structural Health MonitoringPDF unavailable
7Microfabrication TechnologiesPDF unavailable
8Thin-film Materials and their DepositionPDF unavailable
9Approaches for Pattern TransferPDF unavailable
10Surface Micromachining of MicrostructuresPDF unavailable
11Bulk Micromachining of MicrosystemsPDF unavailable
12Extended Approaches for Working MicrosystemsPDF unavailable
13Non-conventional Approaches for MicrosystemsPDF unavailable
14Packaging of MicrosystemsPDF unavailable
15Deformation Strains and StressesPDF unavailable
16Microdevice Suspensions: Lumped ModelingPDF unavailable
17Residual Stress and Stress GradientsPDF unavailable
18Torsion and TwistPDF unavailable
19Vibrations of Microsystems Devices: Part -1PDF unavailable
20Vibrations of Microsystems Devices: Part -2 Micromachined Gyroscopes: Part -1PDF unavailable
21Micromachined Gyroscopes: Part -2 Modelling of Coupled Electrostatic Microsystems: Part -1PDF unavailable
22Modelling of Coupled Electrostatic Microsystems: Part -2PDF unavailable
23Coupled Electrothermal-elastic ModellingPDF unavailable
24Modelling of Microsystems: Scaling EffectsPDF unavailable
25Finite Element Method and MicrosystemsPDF unavailable
26Theoretical Basis for the Finite Element MethodPDF unavailable
27Energy Theorems and Weak Form of the Governing EquationPDF unavailable
28Finite Element Equation Development and Shape FunctionsPDF unavailable
29Isoparametric FE Formulation and some ExamplesPDF unavailable
30Finite Element for Structures with Piezoelectric MaterialPDF unavailable
31Semiconductor Device PhysicsPDF unavailable
32BJT and MOSFET Characteristics and Op-AmpsPDF unavailable
33Op-Amp Circuits and Signal conditioning for Microsystems DevicesPDF unavailable
34Control and MicrosystemsPDF unavailable
35Vibration Control of a BeamPDF unavailable
36Signal Conditioning Circuits and Integration of Microsystems and MicroelectronicsPDF unavailable
37Pressure Sensor Design Concepts, Processing, and Packaging: Part -1PDF unavailable
38Pressure Sensor Design Concepts, Processing, and Packaging: Part -2PDF unavailable
39Pressure Sensor Design Concepts, Processing, and Packaging: Part -3 Capacitive Micro-accelerometer: Part -1PDF unavailable
40Capacitive Micro-accelerometer: Part -2PDF unavailable


Sl.No Language Book link
1EnglishNot Available
2BengaliNot Available
3GujaratiNot Available
4HindiNot Available
5KannadaNot Available
6MalayalamNot Available
7MarathiNot Available
8TamilNot Available
9TeluguNot Available