Module NameDownload


Sl.No Chapter Name MP4 Download
1Introduction to Microscale Sensors or MEMSDownload
2Scaling effectDownload
3Some Simple MechanicsDownload
4Basic Mechanics - Part 01Download
5Basic Mechanics - Part 02Download
6Basic Mechanics - Part 03Download
7ElectrostaticsDownload
8Electrostatic forceDownload
9Coupled electromechanicsDownload
10StictionDownload
11Si crystal structureDownload
12Si etchingDownload
13KOH etchingDownload
14TMAH etchingDownload
15Deposition and LithographyDownload
16Lithography Download
17Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensingDownload
18Pressure Sensor - IIDownload
19Pressure Sensor - IIIDownload
20Accelerometer - IDownload
21Accelerometer - IIDownload
22Assignment 1Download
23Assignment 2Download

Sl.No Chapter Name English
1Introduction to Microscale Sensors or MEMSDownload
Verified
2Scaling effectDownload
Verified
3Some Simple MechanicsDownload
Verified
4Basic Mechanics - Part 01Download
Verified
5Basic Mechanics - Part 02Download
Verified
6Basic Mechanics - Part 03Download
Verified
7ElectrostaticsDownload
Verified
8Electrostatic forceDownload
Verified
9Coupled electromechanicsDownload
Verified
10StictionDownload
Verified
11Si crystal structureDownload
Verified
12Si etchingDownload
Verified
13KOH etchingDownload
Verified
14TMAH etchingDownload
Verified
15Deposition and LithographyDownload
Verified
16Lithography Download
Verified
17Pressure sensor types, membrane, Piezoelectric sensing, capacitive sensingDownload
Verified
18Pressure Sensor - IIDownload
Verified
19Pressure Sensor - IIIDownload
Verified
20Accelerometer - IDownload
Verified
21Accelerometer - IIDownload
Verified
22Assignment 1PDF unavailable
23Assignment 2PDF unavailable


Sl.No Language Book link
1EnglishNot Available
2BengaliNot Available
3GujaratiNot Available
4HindiNot Available
5KannadaNot Available
6MalayalamNot Available
7MarathiNot Available
8TamilNot Available
9TeluguNot Available